NSF Summer Institute on Nanomechanics, Nanomaterials and Micro/Nanomanufacturing

NSF Fellowship
Travel Directions

High-Rate Nanomanufacturing
June 2 - 5, 2008
Northwestern University
Evanston, Illinois

Martin Culpepper (Massachusetts Institute of Technology)
Nicolas Fang  (University of Illinois, Urbana-Champaign)
Placid Ferreira (University of Illinois, Urbana-Champaign)
Marc Madou (University of California, Irvine)

The future of nanotechnology will depend on creating tools, instruments, metrology devices and manufacturing processes that will enable effective positioning of molecules or nanoscale building blocks into complex structures with high precision and throughputs.

The purposes of this course are to teach participants

  1. principles and best practices that should be considered when purchasing, creating, or using instruments/equipment/devices for nano-scale measurements/manufacturing.
  2. principles of top-down processes;
  3. principles of bottom-up processes;
  4. principles of continuous processes for high-rate nano-manufacturing; and
  5. applications of micro/nano-manufacturing processes to create bio-sensors and batteries.

Class schedule:

June 2 - Day 1 morning  Madou
             Day 1 afternoon  Culpepper
June 3 - Day 2 morning  Madou
             Day 2 afternoon  Culpepper
June 4 - Day 3 morning  Culpepper
             Day 3 afternoon  Ferreira and Fang
June 5 - Day 4 morning Ferreira and Fang

Prof. Marc Madou will teach

  1. Top-Down and Bottom-Up Manufacturing Compared
  2. Biomimetic Manufacturing Explored
  3. Carbon MEMS and NEMS
  4. Rapid Prototyping and Manufacturing of CD Fluidics Platform
  5. Manufacturing Beyond Moore’s Law
  6. From Serial and Batch to Continuous Manufacturing of Biosensors


Prof. Martin Culpepper will teach principles of device/equipment design. Why is this important?  The performance of instruments/equipment/devices that are used for nano-scale characterization and nano-scale manufacturing is extremely sensitive to how they are designed and used.  One needs to have special knowledge of how/why they are sensitive in order to obtain the best performance.  Without this knowledge, many researchers/engineers (i) spend too much money on instruments/equipment/devices, (ii) purchase the wrong instruments/equipment/devices, (iii) design devices/experiments that are not well-suited for measurement and/or manufacturing, (iv) come to believe that it is impossible to obtain certain types of data, and/or (v) don't obtain the best data that is possible.  The design/manufacturing knowledge that is contained within this course give scientists/engineers the knowledge and tools they need to avoid (i)-(v).  Major topics include:
a. Introduction and overview of research/manufacturing needs for devices that make/manipulate/measure
b. Principles of accuracy, repeatability and design of experiments
c. A deterministic approach to the engineering of instruments/equipment/devices
d. Common types of instruments/equipments/devices
e. Design and fabrication of instruments/equipment/devices that are:
    - Nano-scale in size
    - Micro-scale in size
    - Macro-scale in size
    - Multi-scale (integrate components from different size scales)
f. hands-on experiments will be conducted for every participant led by Prof. Culpepper. Participants assemble and characterize a nano-positioning stage to better understand the principles that were taught in class.

Prof. Placid Ferreira and Prof. Nick Fang will teach the principles of top-down processes, topics include beam-based  processes (optical, e-beam, ion-beam) for nanomanufacturing and high-resolution printing and imprinting processes.


Prof. Culpepper received his BSME (1995) from Iowa State University, and his MS/PhD (1997/ 2000) from the Massachusetts Institute of Technology. He then ran his own consulting company before returning to join the faculty of Mechanical Engineering at MIT in 2001. Prof. Culpepper is the recipient of an NSF Presidential Early Career Award (PECASE) for his work in nanomanufacturing equipment/instrumentation, two R&D 100 awards (1999, 2003) and a TR100 award. Prof. Culpepper's research laboratory - Precision Compliant Systems Laboratory - works on the science/engineering required to create new positioning technologies for emerging manufacturing and instrumentation applications. Prof. Culpepper is the Assistant Director of the MIT Interdepartmental Laboratory for Manufacturing and Productivity and he is the founding Director of the MIT Precision Engineering Center.

Prof. Nicholas X. Fang obtained his MS and BS in physics from Nanjing University, China, and PhD in Mechanical Engineering from the University of California at Los Angeles. He joined the faculty of Mechanical Engineering at the University of Illinois at Urbana-Champaign in 2004.  His research highlight includes first demonstration of optical superlensing (Science 2005, and recently listed by SCI as a fast breaking work of physics), invention of far IR magnetic/plasmonic metamaterials (Science 2004), and development of 3D micro/nanolithography systems. He is also interested in the energy and mass transport phenomena in micro- and nanoscale systems, mold transfer and metallization technologies and design and manufacturing of negative index materials and devices. He is the recipient of ASME Pi Tau Sigma Gold Medal of year 2006.

Prof. Placid M. Ferreira is the Grayce Wicall Gauthier Professor of Mechanical and Industrial Engineering at Illinois. He is also the director of the Center for Chemical-Electrical-Mechanical Manufacturing Systems (Nano-CEMMS), an NSF-sponsored Nanoscale Science and Engineering Center. He graduated with a Ph.D in Industrial Engineering from Purdue University in 1987, M.Tech (Mechanical) from IIT Bombay, 1982 and B.E. (Mechanical) for University of Bombay in 1980. He has been on the mechanical and industrial faculty at Illinois since 1987, serving as the associate head for graduate programs and research from 1999 to 2002. Professor Ferreira's research and teaching interests are in the area of industrial automation and include computer-controlled machine-tools, nanopositioning and sensing, computational geometry and solid modeling with applications to automated process planning, and the discrete-event control of large-scale flexibly automated systems. Professor Ferreira received the NSF Presidential Young Investigator Award in 1990, SME's Outstanding Young Investigator Award in 1991 and the University of Illinois' University Scholar Award in 1994. He has served as an associate editor for IIE Transactions on Design and Manufacturing and is currently an editor for IEEE Transactions on Automation Science and Engineering and is on the editorial board for the International Journal of Computer Integrated Manufacturing.

Before joining UCI as the Chancellor's Professor in Mechanical and Aerospace Engineering (MEA), Dr. Madou was Vice President of Advanced Technology at Nanogen in San Diego, California. He specializes in the application of miniaturization technology to chemical and biological problems (BIO-MEMS). He is the author of several books in this burgeoning field he helped pioneer both in Academia and in Industry. He founded several micromachining companies and has been on the board of many more. Many of his colleagues became well know in their own right in academia and through successful MEMS start-ups. Madou was the founder of the SRI International's Microsensor Department, founder and President of Teknekron Sensor Development Corporation (TSDC), Visiting Miller Professor at UC Berkeley and Endowed Chair at the Ohio State University (Professor in Chemistry and Materials Science and Engineering). He has finished the third edition of "Fundamentals of Microfabrication," an introduction to MEMS which has become known as the "bible" of micromachining. Some of Prof. Madou's recent research work involves artificial muscle for responsive drug delivery, a compact disc-based fluidic platform and a solid state pH electrode based on IrOx. To find out more about those recent research projects, visit www.biomems.net. At UCI, Prof. Madou works on carbon-MEMS, a CD based fluidic platform, solid state pH electrodes, artificial muscle for responsive drug delivery and integrating fluidics with DNA arrays as well as researching label-free assays for the Molecular Diagnostics platform of the future.